Simco-Ion 电晕放电式离子产生器 4630-宜器服务网

产品详情

4630 电晕放电式离子产生器

Simco-Ion Quadbar 离子产生器型号 4630 是业内第一个能安装在制程空间内的电晕放电式离子产生器，有效地控制空间内的静电荷。独特的四极静电针架构设计，确保在短距离处有效电离，能把产品放置靠近到 3 英寸 (7.6 厘米) 左右。4630 紧凑和以 24 VDC 电源输入的设计，符合在制程设备内紧密有限的环境内装放，同时可使用设备的 24 VDC 电源供应。如需要，Quadbar 可输出工作状态，通知制程工具控制台，或设备监控系统。
Simco-Ion Quadbar 的设计是同类产品最洁净的，以 24 VDC 电源输入，符合 ISO 14644-1Class 1 洁净水平。

产品特点
•采用IsoStat®技术的四极杆配置
•尺寸小巧
•24 VAC或24 VDC操作
•可用于单晶硅发射点
•FMS或工艺工具控制器的报警输出

优点

•在距离产品3英寸（7.6 cm）的距离处提供快速放电和稳定平衡
•适合任何工艺工具的严格限制
•连接到24 VAC或24 VDC电源，或使用Ion控制器或小型变压器操作
•发射点为电离提供了最清洁的发射点材料，当使用24 VDC电源运行时，符合ISO 14644-1 1级标准，而当使用24 VAC电源运行时满足ISO 14644-2级标准。
•确保立即通知灾难性系统故障

4630 技术参数

Model 4630 QuadBar
Input Voltage	24 VAC 35 mA via 33-1421-01 or 33-1431-01 transformer, Model 4030 controller or properly grounded 24 VAC power supply or 24 VDC power from tool power supply (but with reduced ion output)
Balance	±50V @ 6” and 12” (30.5 cm) directly under emitter points with airflow (80-100 fpm)
Discharge	<30 sec @ 12” (30.5 cm) directly under the emitter points with airflow (80-100 fpm)
Ion Emission	Steady-state DC
Emitter Points	Single crystal silicon standard, field-replaceable, 2-3 year estimated life
Cleanliness	ISO Class 1 when powered with 24 VDC; ISO Class 2 when powered with 24 VAC with 33-1421-01 transformer or Model 4030 Controller
Coverage Area	12” x 12” (30.5 x 30.5 cm)
Airflow	80-100 fpm recommended
LED Indicators	Green POWER; red ALARM
Status Output	Model 5090 FMS interface attachment; Model 4030 controller signals OK or system failure
Daisy-chain	Up to 4 units via transformer; up to 16 units via Model 4030 controller
Operating Env.	Temperature 15-50°C (59-122°F) recommended; relative humidity 20-65%
Maintenance	Emitter point cleaning at monthly to quarterly intervals, depending on environment; no adjustment or calibration required
Mounting	Can be mounted to any process tool or flowhood using 4 #6 screws
Enclosure	ABS
Dimensions	1.3”H x 1.3”W x 4.5”L (33 x 33 x 114 mm)
Weight	3.44 oz (100.3g)
Warranty	Two year limited warranty
33-1421-01 Transformer
Input Voltage	120 VAC ±10%, 60 Hz
Output Voltage	24 VAC ±5% @ 500 mA
Dimensions	3.0H x 1.9W x 1.6D in. (76.5 x 48.5 x 40 mm)
Weight	0.9 lb (0.4 kg)
33-1431-01 & 33-1434-01 Transformers
Input Voltage	230 VAC ±10%, 50 Hz
Output Voltage	24 VAC ±5% @ 500 mA
Dimensions	3.2H x 2.2W x 1.9D in. (81.5 x 56.5 x 48.5 mm)
Weight	0.9 lb (0.4 kg)