4635 空气辅助离子产生器
Simco-Ion QuadBar™ 空气辅助离子产生器型号 4635 提供细小而有效的静电控制。独特的四极静电针架构设计,确保在短距离处有效电离,能把产品放置靠近到 3 英寸 (7.6厘米) 左右。4635紧凑细小的设计,容易装放在制程设备内紧密有限的环境内。使用独立的空气辅助系统中,4635的离子吹送不需要或不受环境气流的限制。
Quadbar 型号 4635有两个空氣輔助盒設計。每个利用跨通道围绕静电针,提供最佳的空气分布。标准空氣輔助盒提供静电针气流套,输送空气包围和保护针尖,延长清洁周期。喷射空氣輔助盒透过中心孔,输送高速离子气流,达至极快的消散时间。它的电源输入可使用设备上的 24 VDC 电源 或 24 VAC 专属变压器 或 4030 控制台。
产品特点
•具有跨通道空气输送的空气辅助滤芯设计;两种墨盒设计选项
•可旋转墨盒设计
•采用IsoStat技术的四极杆配置
•尺寸小巧
•单晶硅发射点
•FMS或工艺工具控制器的报警输出
优点
•可选择带护套发射点的标准筒以延长清洁时间,或选择高速喷射筒以实现极快的排放时间
•允许在两侧或端部定位进气管,以实现安装灵活性
•在距离产品3英寸(7.6厘米)的距离处提供稳定的平衡
•小尺寸适合工艺设备的严格限制
•发射点材料的半标准根据输入功率提供ISO 14644-1 1级或2级清洁度
•确保立即通知灾难性系统故障”
4635 技术参数
型号 | 4635 |
Input Voltage | 24 VAC ±5% @ 0.10A, 50/60 Hz, 2.4W; 24 VDC ±5% @ 0.025A, 0.6W (typ) |
Balance | ±50V @ 6” & 12” (15.2 & 30.5 cm) directly under the emitter points |
Discharge | Standard Cartridge<15 sec @ 12” (30.5 cm) directly under emitter points with 15 lpm (min) purging gas airflow; Jet Cartridge <6 sec @ 12” (30.5 cm) directly under emitter points with 15 lpm (min) purging gas airflow |
Ion Emission | Steady-state DC |
Emitter Points | Single Crystal Silicon standard, 2-3 year est. life (depending on process environment) |
Cleanliness | ISO Class 1 when powered with 24 VDC; ISO Class 2 when powered with 24 VAC with 33- 1421-01 transformer or Model 4030 Controller |
Coverage Area1 | 12” x 12” (30.5 x 30.5 cm) at a distance of 12” |
Air Supply | Clean dry air (CDA) or nitrogen |
Airflow | 0-25 lpm at a setting of 0-7 psi |
Air Connection | 0.15” (4 mm) OD tubing with 2 micron filter or better |
LED Indicators | Green POWER; red ALARM |
Status Output | FMS Model 5090 interface with 33-1421-01 transformer or direct wire; Controller Model 4030 signal OK or system failure |
Operating Env. | Temperature 15-50°C (59-122°F) recommended; humidity 20-65% RH |
Maintenance | Emitter point cleaning at monthly to quarterly intervals depending on environment; no adjustment or calibration required |
Daisy-chain | Up to 4 units when used with 33-1421-01 transformer; up to 16 units via Controller Model 4030 |
Mounting | Can be mounted to any process tool or flowhood using 4 #6 screws |
Enclosure | ABS, polycarbonate air assist cartridges, mylar & stainless steel labels |
Dimensions | 1.3”H x 1.3”W x 4.5”L (33 x 33 x 114 mm) air connection elbow on the side, width 1.92” (4.88 cm); air connection elbow on the end, ionizer body length 3.9” (10 cm) |
Weight | 3.8 oz (108g) |
Warranty | Two-year limited warranty |
33-1421-01 Transformer | |
Input Voltage | 120 VAC ±10%, 50 Hz |
Output Voltage | 24 VAC ±5% @ 500 mA |
Dimensions | 3.0H x 1.9W x 1.6D in. (76.5 x 48.5 x 40 mm) |
Weight | 0.9 lb (0.4 kg) |
Certifications | |
33-1431-01 & 33-1434-01 Transformer | |
Input Voltage | 230 VAC ±10%, 60 Hz |
Output Voltage | 24 VAC ±5% @ 500 mA |
Dimensions | 3.2H x 2.2W x 1.9D in. (81.5 x 56.5 x 48.5 mm) |
Weight | 0.9 lb (0.4 kg) |